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Reaction Tubes

product details

The 8 inch quartz reaction tube is a core component in high-temperature semiconductor and photovoltaic processing systems, designed to provide a clean and stable reaction environment for processes such as diffusion, oxidation, LPCVD, and annealing. Manufactured from high-purity fused quartz, it offers excellent thermal shock resistance, low thermal expansion, and outstanding chemical inertness to corrosive gases.

Its precise inner diameter and smooth surface finish support uniform gas flow and temperature distribution, ensuring consistent wafer processing results. The tube’s structural integrity under repeated thermal cycling minimizes deformation and contamination risks, contributing to long-term process stability and equipment reliability.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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